Modeling and simulation of Polysiloxane diaphragm pressure sensor whit graphene beam
DOI:
https://doi.org/10.58916/jhas.v7i6.581الكلمات المفتاحية:
الانجليزيةالملخص
This paper studies a resonant pressure sensor whose elementary sensing component is the polysiloxane circular diaphragm, and the final sensing component is the graphene beam resonator attached to the polysiloxane circular diaphragm. The relationship between the fundamental natural frequency of the beam resonator and the measured pressure is calculated. As the beam is located at different positions of the upper plane of the polysiloxane circular diaphragm along its radial direction is a simulation, analyzed, and investigated. Some significant results are obtained. . Based on the differential output frequencies, a set of optimum parameters of the proposed Pressure Sensor is determined. The performed pressure range is 0~10Kpa. Keywords: polysiloxanee , beam, pressure; graphene; Frequency.
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